1, 1, 1, 3, 9, 21, 81, 351, 1233, 46089, 434241, 2359611, 27387801, 264333213, 1722161169, 16514298711, 163094452641, 1216239520401, 50883607918593, 866931703203699, 8473720481213481, 166915156382509221, 2699805625227141201, 28818706120636531023, 439756550972215638129, 6766483260087819272601, 77096822666547068590401, 406859605390184444341678251