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⇱ Cleanroom Fundamentals & Semiconductor Technologies | Coursera


Cleanroom Fundamentals & Semiconductor Technologies

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Cleanroom Fundamentals & Semiconductor Technologies

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Gain insight into a topic and learn the fundamentals.
Beginner level

Recommended experience

9 hours to complete
Flexible schedule
Learn at your own pace

Gain insight into a topic and learn the fundamentals.
Beginner level

Recommended experience

9 hours to complete
Flexible schedule
Learn at your own pace

What you'll learn

  • In a semiconductor cleanroom, you learn how to work in a highly controlled environment where cleanliness and safety are essential.

  • Learn how devices are fabricated on silicon wafers via techniques like Photolithography, Etching, Deposition, and more.

Details to know

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Recently updated!

January 2026

Assessments

1 assignment

Taught in English

There are 4 modules in this course

This entry-level online course offers a brief overview of silicon-based semiconductor fabrication, geared toward engineering undergraduates, graduate students, and pre-college learners exploring career paths in the semiconductor field. No prior experience is required. Students receive an introduction to cleanroom facilities and the environment in which microfabrication takes place. They will then apply their knowledge in a hands-on virtual lab that walks you through University at Buffalo's Davis Hall Cleanroom (among the most advanced in the region) that demonstrates the core processes of Photolithography and Etching.

What's included

3 videos3 readings

3 videosβ€’Total 4 minutes
  • Introduction Videoβ€’2 minutes
  • University at Buffalo - Cleanroom Tour β€’1 minute
  • SUNY Erie Community College - Cleanroom Tourβ€’1 minute
3 readingsβ€’Total 12 minutes
  • Welcome Message & Course Overviewβ€’5 minutes
  • Course Syllabus (Downloadable PDF)β€’5 minutes
  • Acknowledgementsβ€’2 minutes

This section of the course covers essential topics related to cleanroom operations and semiconductor fabrication. Key areas include an Introduction to Transistors, the Fundamentals of Cleanroom Environments, Semiconductor Materials, an Overview of Vacuum Science, and the Principles and Processes of Physical Vapor Deposition (PVD).

What's included

5 videos10 readings1 discussion prompt

5 videosβ€’Total 141 minutes
  • Transistors Video Lectureβ€’7 minutes
  • Cleanrooms β€’43 minutes
  • Semiconductor Materialsβ€’38 minutes
  • Vacuum Science Overviewβ€’27 minutes
  • Physical Vapor Deposition (PVD)β€’26 minutes
10 readingsβ€’Total 63 minutes
  • Transistors Slidesβ€’5 minutes
  • ElectronicsHub - Additional Resourceβ€’10 minutes
  • Cleanrooms Slidesβ€’5 minutes
  • Cleanroom: A Comprehensive Guide - Additional Resourceβ€’7 minutes
  • Semiconductor Materials Slidesβ€’5 minutes
  • Semiconductor Fabrication - Additional Resourcesβ€’7 minutes
  • Vacuum Science Overview Slidesβ€’5 minutes
  • Leybold Fundamentals - Additional Resourceβ€’7 minutes
  • Physical Vapor Deposition (PVD) Slidesβ€’5 minutes
  • What is Physical Vapor Deposition (PVD)? - Additional Resourceβ€’7 minutes
1 discussion promptβ€’Total 10 minutes
  • Discussion Promptsβ€’10 minutes

An Overview of Chemical Vapor Deposition (CVD), Semiconductor Doping, Thermal Oxidation of Silicon, Wet and Dry Processing, and Photolithography.

What's included

6 videos12 readings1 discussion prompt

6 videosβ€’Total 178 minutes
  • Chemical Vapor Deposition (CVD)β€’38 minutes
  • Dopingβ€’33 minutes
  • Oxidationβ€’27 minutes
  • Wet Processingβ€’16 minutes
  • Dry Etchingβ€’17 minutes
  • Photolithographyβ€’46 minutes
12 readingsβ€’Total 72 minutes
  • Chemical Vapor Deposition (CVD) Slidesβ€’5 minutes
  • MIT News & Lam Research - Additional Resourcesβ€’7 minutes
  • Doping Slidesβ€’5 minutes
  • The Role of Doping & Ion Implantation - Additional Resourceβ€’7 minutes
  • Oxidation Slidesβ€’5 minutes
  • Thermal Oxidation - Additional Resourceβ€’7 minutes
  • Wet Processing Slidesβ€’5 minutes
  • Etching for Wet Processing & RCA Critical Cleaning Process - Additional Resourceβ€’7 minutes
  • Dry Etching Slidesβ€’5 minutes
  • Understanding Plasma Etching - Additional Resourceβ€’7 minutes
  • Photolithography Slidesβ€’5 minutes
  • Semiconductor Lithography - Additional Resourceβ€’7 minutes
1 discussion promptβ€’Total 10 minutes
  • Discussion Promptsβ€’10 minutes

This two-part lab experience provides students with an immersive, hands-on introduction to fundamental semiconductor fabrication processes, specifically within the Photolithography Bay (Yellow Light) and the Etching Bay (White Light). Through direct work with silicon wafers, students will learn how intricate patterns are transferred and developed in microfabrication.

What's included

6 videos2 readings1 assignment1 discussion prompt

6 videosβ€’Total 51 minutes
  • Vapor-Priming Waferβ€’7 minutes
  • Spin-Coat Photoresistβ€’7 minutes
  • Expose Image β€’22 minutes
  • Develop Imageβ€’8 minutes
  • Etched Patterned Waferβ€’5 minutes
  • Remove Photoresistβ€’1 minute
2 readingsβ€’Total 10 minutes
  • Photolithography Bay - What it is & Why Yellow Light?β€’5 minutes
  • Etch Bay Description - What it is & Why White Light?β€’5 minutes
1 assignmentβ€’Total 5 minutes
  • Course Reflection & Future Perspectiveβ€’5 minutes
1 discussion promptβ€’Total 10 minutes
  • Optional Discussion Prompt: Course Reflection & Future Perspective β€’10 minutes

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