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⇱ Introduction to Microfabrication | Coursera

Introduction to Microfabrication

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Gain insight into a topic and learn the fundamentals.
Intermediate level

Recommended experience

9 hours to complete
Flexible schedule
Learn at your own pace
Gain insight into a topic and learn the fundamentals.
Intermediate level

Recommended experience

9 hours to complete
Flexible schedule
Learn at your own pace

Build your subject-matter expertise

This course is part of the Introduction to Semiconductor and MEMS Fabrication Specialization
When you enroll in this course, you'll also be enrolled in this Specialization.
  • Learn new concepts from industry experts
  • Gain a foundational understanding of a subject or tool
  • Develop job-relevant skills with hands-on projects
  • Earn a shareable career certificate

There are 3 modules in this course

In this introductory course, the field of microfabrication and how it is used to create semiconductor and MEMS devices is presented. Learners will develop a high-level understanding of the basic principles of physics and material properties that power the functionality of these technologies. A foundational overview provides learners with a greater appreciation of the varied and interconnected driving forces that influence device design, fabrication, and testing through the lenses of the fabrication process flow, commercial market, and value chain. Introduction to the cleanroom as a critical component of device success familiarizes learners to the microfabrication environment.

This course is part of the Semiconductor and MEMS Fabrication Specialization. It is recommended that learners take the previous courses of the Specialization prior to this course. Please disregard module numbers because the content has been reorganized to improve comprehension and flow of the specialization.

The first module provides an overview of the specialization and begins with a brief introduction to microfabrication technology. The microfabrication ecosystem is introduced along with some context concerning the CHIPS Act 2023 and the motivation for domestic fabrication. Some basic terminology and fundamental concepts is established to prepare you as we dive deeper into each of our topics in subsequent modules. The history of computing and MEMS is succinctly discussed and the development of these technologies over the decades is covered. Note: Some lectures reference hands-on sessions that are not available in this presentation of the content. Additionally, the "course syllabus" is not relevant for this course as the content has been reorganized to improve comprehension and flow.

What's included

4 videos3 readings4 assignments

4 videos•Total 53 minutes
  • Microtechnology Introduction and Overview - Video 1•19 minutes
  • Microtechnology Introduction and Overview - Video 2•13 minutes
  • Microtechnology Introduction and Overview - Video 3.1•14 minutes
  • Microtechnology Introduction and Overview - Video 4•7 minutes
3 readings•Total 90 minutes
  • Microtechnology Introduction and Overview - Module Overview•30 minutes
  • Microtechnology Introduction and Overview - Video 3.2•30 minutes
  • Microtechnology Introduction and Overview - Additional Resources•30 minutes
4 assignments•Total 80 minutes
  • Microtechnology Introduction and Overview - Quiz 1•20 minutes
  • Microtechnology Introduction and Overview - Quiz 2•20 minutes
  • Microtechnology Introduction and Overview - Quiz 3•20 minutes
  • Microtechnology Introduction and Overview - Quiz 4•20 minutes

In this module, we provide an overview of the fabrication process and walk through examples of how processes integrate to create device layers. Lastly, an introduction to vacuum science and technology provides a foundation for understanding many critical fabrication processes.

What's included

4 videos2 readings4 assignments

4 videos•Total 44 minutes
  • Microfabrication Process Flow - Video 1•9 minutes
  • Microfabrication Process Flow - Video 2•10 minutes
  • Microfabrication Process Flow - Video 3•7 minutes
  • Microfabrication Process Flow - Video 4•18 minutes
2 readings•Total 60 minutes
  • Microfabrication Process Flow - Module Overview•30 minutes
  • Microfabrication Process Flow - Additional Resources•30 minutes
4 assignments•Total 65 minutes
  • Microfabrication Process Flow - Quiz 1•20 minutes
  • Microfabrication Process Flow - Quiz 2•15 minutes
  • Microfabrication Process Flow - Quiz 3•15 minutes
  • Microfabrication Process Flow - Quiz 4•15 minutes

In this module, we discuss the need for, design, and operation of cleanrooms as they relate to microfabrication processing.

What's included

3 videos2 readings3 assignments

3 videos•Total 40 minutes
  • Cleanroom Operations - Video 1•21 minutes
  • Cleanroom Operations - Video 2•7 minutes
  • Cleanroom Operations - Video 3•13 minutes
2 readings•Total 60 minutes
  • Cleanroom Operations - Module Overview•30 minutes
  • Cleanroom Operations - Additional Resources•30 minutes
3 assignments•Total 45 minutes
  • Cleanroom Operations - Quiz 1•15 minutes
  • Cleanroom Operations - Quiz 2•15 minutes
  • Cleanroom Operations - Quiz 3•15 minutes

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Instructors

University of Minnesota
5 Courses•1,697 learners

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Frequently asked questions

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