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⇱ Introduction to Micro Electro Mechanical Systems (MEMS) | Coursera

Introduction to Micro Electro Mechanical Systems (MEMS)

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Introduction to Micro Electro Mechanical Systems (MEMS)

Included with

Gain insight into a topic and learn the fundamentals.
Intermediate level

Recommended experience

9 hours to complete
Flexible schedule
Learn at your own pace
Gain insight into a topic and learn the fundamentals.
Intermediate level

Recommended experience

9 hours to complete
Flexible schedule
Learn at your own pace

Build your subject-matter expertise

This course is part of the Introduction to Semiconductor and MEMS Fabrication Specialization
When you enroll in this course, you'll also be enrolled in this Specialization.
  • Learn new concepts from industry experts
  • Gain a foundational understanding of a subject or tool
  • Develop job-relevant skills with hands-on projects
  • Earn a shareable career certificate

There are 3 modules in this course

MEMS devices leverage the same equipment and processes used for semiconductor devices to create microscale sensors and actuators that drive innovation across a wide range of technologies in modern society. Through this course, learners will be able to demonstrate how these processes are specifically used for MEMS fabrication and highlight some differences from semiconductor fabrication. Key applications in consumer, industrial, aerospace, and medical applications are highlighted and described in more detail.

This course is part of the Semiconductor and MEMS Fabrication Specialization. It is recommended that learners take the previous courses of the Specialization prior to this course. Please disregard module numbers because the content has been reorganized to improve comprehension and flow of the specialization.

In this module, we dive into some of the specifics involved in the creation of MEMS devices. We begin by briefly covering some of the physical phenomena used in MEMS devices and then discuss the differences between bulk and surface micromachining fabrication processes. Lastly, we provide more detail around requirements and techniques used in the packaging for MEMS.

What's included

3 videos2 readings3 assignments

3 videos•Total 58 minutes
  • Fabrication Processes Specific to MEMS - Video 1•18 minutes
  • Fabrication Processes Specific to MEMS - Video 2•32 minutes
  • Fabrication Processes Specific to MEMS - Video 3•8 minutes
2 readings•Total 60 minutes
  • Fabrication Processes Specific to MEMS - Module Overview•30 minutes
  • Fabrication Processes Specific to MEMS - Additional Resources•30 minutes
3 assignments•Total 45 minutes
  • Fabrication Processes Specific to MEMS - Quiz 1•15 minutes
  • Fabrication Processes Specific to MEMS - Quiz 2•15 minutes
  • Fabrication Processes Specific to MEMS - Quiz 3•15 minutes

This Module covers the field of Micro Electromechanical Systems from the MEMS device design and system specification point of view. The most widely deployed MEMS inertial sensors and MEMS pressure sensors device model, design and fabrication are introduced. Ongoing development of transducer architecture for various applications is presented.

What's included

2 videos4 readings2 assignments8 plugins

2 videos•Total 86 minutes
  • MEMS in Consumer, Aerospace, Industrial - Lecture 1•42 minutes
  • MEMS in Consumer, Aerospace, Industrial - Lecture 2 •45 minutes
4 readings•Total 64 minutes
  • MEMS in consumer, aerospace, industrial - Module Overview•30 minutes
  • MEMS in Consumer, Aerospace, Industrial - Lecture 1•2 minutes
  • MEMS in Consumer, Aerospace, Industrial - Lecture 2•2 minutes
  • MEMS in Consumer, Aerospace, Industrial - Additional Resources•30 minutes
2 assignments•Total 40 minutes
  • MEMS in Consumer, Aerospace, Industrial - Quiz 1•20 minutes
  • MEMS in Consumer, Aerospace, Industrial - Quiz 2•20 minutes
8 plugins•Total 37 minutes
  • MEMS in Consumer, Aerospace, Industrial - product 1•2 minutes
  • MEMS in Consumer, Aerospace, Industrial - product 2•5 minutes
  • MEMS in Consumer, Aerospace, Industrial - product 3•5 minutes
  • MEMS in Consumer, Aerospace, Industrial - product 4•5 minutes
  • MEMS in Consumer, Aerospace, Industrial - product 5•5 minutes
  • MEMS in Consumer, Aerospace, Industrial - product 6•5 minutes
  • MEMS in Consumer, Aerospace, Industrial - product 7•5 minutes
  • MEMS in Consumer, Aerospace, Industrial - product 8•5 minutes

In this module, we discuss the application of MEMS fabrication techniques and MEMS devices to the field of medical applications. We highlight key design considerations and device testing that are specific for devices used in the medical field. Some commercial examples of MEMS medical devices are reviewed and two technologies with unique medical applications, microfluidics and microelectrodes, are discussed in more detail.

What's included

3 videos2 readings3 assignments

3 videos•Total 50 minutes
  • MEMS for Medical Applications - Video 1•19 minutes
  • MEMS for Medical Applications - Video 2•9 minutes
  • MEMS for Medical Applications - Video 3•22 minutes
2 readings•Total 60 minutes
  • MEMS for Medical Applications - Module Overview•30 minutes
  • MEMS for Medical Applications - Additional Resources•30 minutes
3 assignments•Total 45 minutes
  • MEMS for Medical Applications - Quiz 1•15 minutes
  • MEMS for Medical Applications - Quiz 2•15 minutes
  • MEMS for Medical Applications - Quiz 3•15 minutes

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Instructors

University of Minnesota
5 Courses•1,697 learners

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