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⇱ Microfabrication Fundamental Processes | Coursera

Microfabrication Fundamental Processes

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Gain insight into a topic and learn the fundamentals.
Intermediate level

Recommended experience

9 hours to complete
Flexible schedule
Learn at your own pace
Gain insight into a topic and learn the fundamentals.
Intermediate level

Recommended experience

9 hours to complete
Flexible schedule
Learn at your own pace

Build your subject-matter expertise

This course is part of the Introduction to Semiconductor and MEMS Fabrication Specialization
When you enroll in this course, you'll also be enrolled in this Specialization.
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  • Gain a foundational understanding of a subject or tool
  • Develop job-relevant skills with hands-on projects
  • Earn a shareable career certificate

There are 3 modules in this course

Thin-film deposition, lithography, and etching form the most fundamental processes used in microfabrication to create devices. This course introduces these processes, providing learners with an understanding of the techniques, physical phenomena, and material properties that inform fabrication decisions.

This course is part of the Semiconductor and MEMS Fabrication Specialization. It is recommended that learners take the previous courses of the Specialization prior to this course. Please disregard module numbers because the content has been reorganized to improve comprehension and flow of the specialization.

In this module we cover thin film deposition using both physical and chemical methods. We briefly discuss some of the important features of thin films that determine the materials and deposition processes selected. A general introduction is provided for some of the most commonly used physical and chemical deposition methods.

What's included

3 videos2 readings3 assignments

3 videos•Total 68 minutes
  • Thin-Film Deposition - Video 1•7 minutes
  • Thin-Film Deposition - Video 2•35 minutes
  • Thin-Film Deposition - Video 3•26 minutes
2 readings•Total 60 minutes
  • Thin Film Deposition - Module Overview•30 minutes
  • Thin-Film Deposition - Additional Resources•30 minutes
3 assignments•Total 45 minutes
  • Thin-Film Deposition - Quiz 1•15 minutes
  • Thin-Film Deposition - Quiz 2•15 minutes
  • Thin-Film Deposition - Quiz 3•15 minutes

In this module we discuss lithography techniques and technologies, which are one of the foundational process steps to all microfabrication technologies.

What's included

3 videos2 readings3 assignments

3 videos•Total 38 minutes
  • Lithography Techniques - Video 1•19 minutes
  • Lithography Techniques - Video 2•5 minutes
  • Lithography Techniques - Video 3•14 minutes
2 readings•Total 60 minutes
  • Lithography Techniques - Module Overview•30 minutes
  • Lithography Techniques - Additional Resources•30 minutes
3 assignments•Total 45 minutes
  • Lithography Techniques - Quiz 1•15 minutes
  • Lithography Techniques - Quiz 2•15 minutes
  • Lithography Techniques - Quiz 3•15 minutes

This module presents an introduction to the fundamental micromachining technology of etching. This is a subtractive process where material is removed to create or transfer pattern to thin film layers.

What's included

3 videos5 readings3 assignments

3 videos•Total 120 minutes
  • Etching Techniques - Lecture 1•39 minutes
  • Etching Techniques - Lecture 2•23 minutes
  • New Video Etching Techniques - Lecture 3•59 minutes
5 readings•Total 38 minutes
  • Etching Techniques - Module Overview•2 minutes
  • Etching Techniques - Lecture 1•2 minutes
  • Etching Techniques - Lecture 2•2 minutes
  • Etching Techniques - Lecture 3•2 minutes
  • Etching Techniques - Additional Resources•30 minutes
3 assignments•Total 60 minutes
  • Etching Techniques - Quiz 1•20 minutes
  • Etching Techniques - Quiz 2•20 minutes
  • Etching Techniques - Quiz 3•20 minutes

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Instructors

University of Minnesota
5 Courses•1,697 learners

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Frequently asked questions

To access the course materials, assignments and to earn a Certificate, you will need to purchase the Certificate experience when you enroll in a course. You can try a Free Trial instead, or apply for Financial Aid. The course may offer 'Full Course, No Certificate' instead. This option lets you see all course materials, submit required assessments, and get a final grade. This also means that you will not be able to purchase a Certificate experience.

When you enroll in the course, you get access to all of the courses in the Specialization, and you earn a certificate when you complete the work. Your electronic Certificate will be added to your Accomplishments page - from there, you can print your Certificate or add it to your LinkedIn profile.

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